Probes
Information
To enable radical miniaturization and combination of scanning electrochemical microscope (SECM) probes with other scanning probe platforms, fabrication schemas exploiting micro- and nano-fabrication technologies are investigated. Micro- and nano-fabrication technologies originate from the field of microelectronics, combining parallel processing possibilities with a miniaturization potential down to sub micron regimes. High-aspect ratio electrochemical tip probes embedded in silicon nitride cantilevers and bended silicon nitride probes have been developed for simultaneous AFM and SECM analyses. The fabrication processes are based on batch processes in combination with an etch-mask technology utilizing FIB techniques to achieve both well defined ultra micro/nano (UME/UNE) electrodes and sharp high-aspect ratio tips on a single cantilever as well as on cantilever arrays.
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