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• Atomic Force Microscope
• 2D Impedance Imaging
• Au/SiN Test Structure

Au/SiN Test Structure

2D AFM impedance imaging capabilities were validated using specially developed microscale gold test patterns. Representative Z⁰ and phase images obtained from the test patterns are compared to their topographic counterparts (topography deflection images).

Note that the phase angle for the gold region is close to zero, indicative of ohmic transport, while the phase of nitride is close to 290°, indicative of capacitive behavior. (Mean phase values for the gold and nitride regions are -0.09° and -88°, respectively.) Note that at the 1 um scale, the boundary between the nitride film and the gold is more clearly resolved by the impedance image than the topography image.

Figure 1: Impedance Map on Au/SiN test structure