Thin Film
Ultra-thin solid oxide fuel cell (SOFC) structures containing electrolyte membranes 50-150nm thick were fabricated with the help of sputtering, lithography, and etching. They were made of 50nm YSZ or YSZ/GDC composite electrolyte and 80nm porous Pt as cathode and anode. The peak power densities were 200 and 400 mW/cm2 at 350°C and 400°C, respectively.
Left: optical images
(a) the SOFC patterns on a four-inch wafer
(b) and a free-standing individual fuel cell
Right: SEM images
(a) cross-section of an SOFC structure
(b) plane-view of Pt electrode morphology
(a) the SOFC patterns on a four-inch wafer
(b) and a free-standing individual fuel cell
Right: SEM images
(a) cross-section of an SOFC structure
(b) plane-view of Pt electrode morphology